In this journal we can get explanation such as microelectromechanical systems, device layer, acoustic radiation, ultrasonic manipulator, capacitive force, force sensor, cells, integrated force sensor, gripping force, force sensing, sensor, surface tension, and microgripper. This journal presents info about force, resolution, sensing, restoring force, device, higher frequency, ﬂuid, voltage, integrated force feedback, systems, surface tension force, ultrasonic device, and force ﬁeld.
Lots of info related to devices, layer, actuator, fabrication, ultrasonic ﬁeld, radiation force, design, central piezoelectric, ultrasonic, manipulation, robotics, deﬂection, and integrated force are presented inside the journal. Below are selected from this journal:
This paper reports an electrostatic microelectromechanical systems (MEMS) gripper with an integrated capacitive force sensor. The sensitivity is more than three orders of magnitude higher than other monolithically fabricated MEMS grippers with force feedback. This force sensing resolution provides feedback in the range of the forces that dominate the micromanipulation process. A MEMS ultrasonic device is described for aligning microobjects suspended in water using ultrasonic ﬁelds. The alignment of the particles is of a sufﬁcient accuracy that the microgripper must only return to a ﬁxed position in order to pick up particles less than 100 m in diameter. The concept is also demonstrated with HeLa cells, thus providing a useful tool in biological research and cell assays.
Furthermore, the journal presents information around monolithically fabricated microgripper, ﬂuid channel, fabrication process, fabrication sequence, ultrasonic force, central piezoelectric element, sensitivity, gripper, capacitor plates, feedback, manipulator design, fabricated microgripper, and different ﬂexure lengths.