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The major benefit of the Laser-Focus Sensor we have developed for use with our NMM-1 Nanopositioning and Nanomeasuring Machine is the facilities it provides for making measurements covering large volumes ranging up to 25mm × 25 mm x 5 mm at nanometer resolutions. The complete Laser Focus Sensor consists of a sensor head, electronics unit, CCD-camera, and a monitor, and is combined with a microscope equipped with a CCD-camera in order to allow optically tracking the location of the beam spot on the surface of the object being scanned, which allows readily picking out, and returning to, areas of interest on its surface.
Additionally, this datasheet tells the reader info such as laser focus sensor, making measurements, focus sensor, and nanomeasuring machine.