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Sensors and Actuators A 119 (2005) 332–335 Flexible membrane pressure sensor H.C. For the model, a 10 × 10 four-node rectangular-shape function elements were modeled using Mathematica v4.1 and the analytical solution is given by respectively, VdcFEM = 142829 × ξ × P ×A ρ (2) VdcExact = 140496 × ξ × P ×A ρ (3) where P is the applied pressure, A the cross section area of sample under pressure, ρ = 1.42E3 kg/m3 the density of thin ﬁlm system, ξ = 0.05244 a calibration constant that converts the thin ﬁlm deﬂection (d, mm) into the corresponding output voltage (V, mV) via curve-ﬁtting method.
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