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3rd International Conference on Sensing Technology, Nov. 30 – Dec. 3, 2008, Tainan, Taiwan New Type Thin Film Vacuum Sensor Using the Short Circuit Seebeck-Current Detection Type Thermocouple Noriaki Takashima and Mitusteru Kimura Faculty of Engineering, Tohoku Gakuin University, 13-1, Chuo-1,Tagajo, Miyagi, 985-8537, JAPAN email@example.com Abstract We have proposed the thin film vacuum sensor that has a cantilever structure with new temperature difference sensors of the short circuit Seebeck-current detection type thermocouple in order to get higher sensitivity in the higher vacuum range.
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