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The complexity of microsystems is steadily increasing due to the scaling of microelectronic as well as for example mechanical, optical or fluidic devices. In order to be able to get good designs fast, one has to apply simulation as well as optimization tools extensively. An exact model of the system under investigation is the necessary basis for these evaluation methods. Looking at micromechanical devices, the touch-down, the moment moving elements touch any static parts of the system, has a major influence on the overall system performance. Hence one definitely needs to consider the systems behavior in touch-mode.
Even more, the paper explains discussion such as measurement, design, sensor, parameter, and overall system performance.