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The heart of this sensor is the “sensor bubble” (pressure-measuring element) produced using 100% thick-film techniques. It is hermetically sealed on a ceramic substrate and contains a given volume of air at a reference pressure of approx. 20 kPa. Piezo-resistive thick-film strain gauges are printed onto the bubble and protected with glass against aggressive media. The strain gauges are characterized by high measurement sensitivity (gauge factor approx. 12), as well as by linear and hysteresis-free behavior. When pressure is applied, they convert mechanical strain into an electric signal. A full-wave bridge circuit provides a measurement signal which is proportional to the applied pressure, and this is amplified by a hybrid circuit on the same substrate.
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