Presentation About Bulk Micromachined Pressure Sensor
Many things like sensor, and thickness measurement are explained inside the presentation. This presentation presents info around pressure sensor, and sensor output.
In the presentation you can get explanation regarding pressure, and pressure sensor calculation. The following are selected from this presentation:
Bulk Micromachined Pressure Sensor OUTLINE Piezoresistive Pressure Sensor Resistor Layout Maskmaking Alignment Details Process Details Packaging Testing Approach Test Results Rochester Institute of Technology Microelectronic Engineering © 13 April 2005 Dr. Lynn Fuller, Motorola Professor Page 2 Bulk Micromachined Pressure Sensor SINGLE CRYSTAL SILICON Thickness 10 µm Wafer Diameter 75 mm Rochester Institute of Technology Microelectronic Engineering © 13 April 2005 Dr. Lynn Fuller, Motorola Professor
Giving more content, the presentation presents more things like measurement, and sensor calculation.
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