Research Paper About Micromachined Capacitive Pressure Sensor Using A Cavity-Less Structure with Bulk -Metal /Elastomer Layers and Its Wireless Telemetry Application

Inside this paper the reader can find things such as pressure monitoring, capacitance, compression, pressure sensor, and passive inductor. Lots of information regarding capacitive pressure, pressure, capacitive, and resonant frequency are described inside the paper.

research paper about micromachined capacitive pressure sensor using a cavity less structure with bulk  metal  elastomer layers and its wireless telemetry application  page1 6216852 Research Paper About Micromachined Capacitive Pressure Sensor Using A Cavity Less Structure with Bulk  Metal /Elastomer Layers and Its Wireless Telemetry Application research paper about micromachined capacitive pressure sensor using a cavity less structure with bulk  metal  elastomer layers and its wireless telemetry application  page2 6216852 Research Paper About Micromachined Capacitive Pressure Sensor Using A Cavity Less Structure with Bulk  Metal /Elastomer Layers and Its Wireless Telemetry Application research paper about micromachined capacitive pressure sensor using a cavity less structure with bulk  metal  elastomer layers and its wireless telemetry application  page3 6216852 Research Paper About Micromachined Capacitive Pressure Sensor Using A Cavity Less Structure with Bulk  Metal /Elastomer Layers and Its Wireless Telemetry Application

The paper gives the reader information around wireless sensing, elastomer, configuration, and capacitive pressure sensor. These are chosen from this paper:

This paper reports a micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two micromachined metal plates and an intermediate polymer layer that is soft enough to deform in a target pressure range. The plates are formed of micromachined stainless steel fabricated by batch-compatible micro-electro-discharge machining. A polyurethane roomtemperature-vulcanizing liquid rubber of 38-μm thickness is used as the deformable material. This structure eliminates both the vacuum cavity and the associated lead transfer challenges common to micromachined capacitive pressure sensors.

Giving more content, this paper explains information around pressure range, sensor, sensors, and device.

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File size: 0.470 MB, number of pages: 19, download server: www.eecs.umich.edu
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