Vibration Sensor with Optoelectronic Interface

In the paper the reader can learn info about resonance frequency, technology, drive current, drive, temperature sensing, resonator, dependence, frequency dependence, sensor chip, and rotating machinery. This paper contains discussion regarding chip, layers, voltage, structure, mechanical structure, fibre, metallization, design, vibration sensor, and sensor.

vibration sensor with optoelectronic interface page1 7302118 Vibration Sensor with Optoelectronic Interface vibration sensor with optoelectronic interface page2 7302118 Vibration Sensor with Optoelectronic Interface vibration sensor with optoelectronic interface page3 7302118 Vibration Sensor with Optoelectronic Interface

Many things related to vibration control, resonance, monolithic integration, frequency, current, absorption, circuit diagram, performance, signal, and semiconductors are presented inside this paper. These are some excerpt from the paper:

micromachined sensor for wear monitoring of rotating machinery is described. It comprises a Si microelectromechanical transducer for vibration sensing, on-chip MOS circuitry for amplification and a hybrid GaAs/GaAlAs infrared emitting diode (IRED) for electrooptical conversion of the measured signal. Bulk micromachining combined with common MOS technology is used for transducer fabrication. In view of a monolithic integration of an IRED heteroepitaxy on Si was investigated.

Also, the paper tells you more regarding fabrication, vibration, optoelectronic interface, wheatstone bridge, interface, metal, circuit, vibration sensing, and fabrication process.

Download Vibration Sensor with Optoelectronic Interface pdf
File size: 0.197 MB, number of pages: 6, download server: www.imec.be
Related Downloads
This entry was posted in Sensor Interfacing and tagged , . Bookmark the permalink.

Leave a Reply

Your email address will not be published. Required fields are marked *