A Micro Force Sensor Using Force – balancing Feedback Control System and Opticfiber Interferometers

There are lots of info around electrostatic force, intensity, applied force, coupler, electrostatic actuator, cantilever probe, force curve, minimum measurable force, electrostatic force feedback, feedback control, fiber interferometer, interference fringe, nano scale, high sensitivity, photo detector, actuator, sensor, torsion bars, optic fiber, balancing force sensor, balancing sensor, and spring are described inside the journal. The journal contains explanation such as electrode, range, force feedback, fiber, force feedback control, rotation, balancing feedback control, detector, control voltage, variation, displacement, torsion, measurable displacement, optical level, fiber interferometers, interferometers, system, measurable force, oscilloscope trace, oscilloscope, and interferometer.

In this journal you can learn description related to laser, interfacial force, trace, force constants, level, fringe, constant, balancing force, glass electrode, voltage, spring constant, force controller, length, force balancing sensor, force sensor, interference, probe displacement control, control system, feedback control system, balancing feedback, fiber optic interferometer, and control. Below are taken from the journal:

The operation of a micro force balancing force sensor with nanonewton resolution is described. The system consists of a lever supported by torsion bars, a force controller, two electrostatic force actuators and two optic fiber interferometers. The rotation of the lever is detected by the optic fiber interferometers, and the lever returns its neutral position by using electrostatic force feedback control system. The design of the force sensor and the minimum measurable range of the force sensor were analyzed by calculating force constants of torsion bars. A displacement of the lever with noise of 5 nm was obtained.

Giving more content, this journal presents more regarding force, capacitance, spacing, fiber optic, probe, feedback, probe displacement, input, design, schematic design, optic fiber interferometers, optic interferometer, sensitivity, measurement, experiment, neutral position, source, minimum measurable displacement, measurable range, force constant, and diode.

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