Design and Fabrication of a MEMS AC Electric Current Sensor

Inside the paper we can learn explanation around force, sensor device, magnetic field gradient, output voltage, layer, aluminum nitride, electrode, mounted sensor magnet, deflection, cross section, and magnet. The paper presents things related to design, sensor design, magnetic field, sensor, single wire, power, current, frequency, electric current sensor, electric current, and line.

There are many information around proximity, sinusoidal force, voltage, magnetic microactuators, wire, voltage signal, response, plot, piezoelectric layer, nitride, and fabrication process are explained inside the paper. The following are excerpted from the paper:

The need for energy efficiency combined with advances in compact sensor network technologies present an opportunity for a new type of sensor to monitor electricity usage in residential and commercial environments. A novel design for a self-powered, proximity based AC electric current sensor has been developed. This sensor device is constructed of a piezoelectric cantilever with a permanent magnet mounted to the cantilever’s free end. When the sensor is placed in proximity to a wire carrying AC electric current, the permanent magnet couples to the wire’s alternating magnetic field, deflecting the piezoelectric cantilever and thus producing a sinusoidal voltage proportional to the current being measured. Analytical models were developed to predict the magnetic forces and piezoelectric voltage output pertaining to this design. MEMS-scale cantilevers are currently under development using a three-mask process and aluminum nitride as the active piezoelectric material.

Giving more content, the paper presents info things like sinusoidal voltage, vapor deposition, electrodes, strain, piezoelectric, equation, signal, current sensor, appliance cord, energy, and sensor network.

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