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The development of a no-contact sensor based on the Self-Mixing effect for the simultaneous measurement of linear and angular degrees-of-freedom (DOFs) of a moving target is presented. The sensor is made up of three laser diodes with integrated monitor photodiodes and a plane mirror target attached to the moving object. The proposed technique makes the system easier to align with respect to the traditional interferometric systems and no further optical elements are required in the laser head except for the laser chip and its integrated photodiode, thus providing an effective compact and low-cost motion control system.
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