Paper About Application of High Performance MEMS Pressure Sensor Based on Dissolved Wafer Process

This paper tells you explanation about sensor, barometric pressure, sensors, and solid state sensors. Lots of info around capacitive pressure, range, vacuum pressure sensors, and measurement are presented in the paper.

Inside this paper we can learn description regarding sensitivity, pressure, capacitive pressure sensors, and barometric pressure sensors. The following are selected from the paper:

Applications of High-Performance MEMS Pressure Sensors Based on Dissolved Wafer Process Srinivas Tadigadapa and Sonbol Massoud-Ansari Integrated Sensing Systems (ISSYS) Inc., 387 Airport Industrial Drive, Ypsilanti, MI 48198 ISSYS’ exclusive dissolved wafer process (DWP) technology has enabled the development of a variety of the state-of-the-art, high performance pressure sensors for a wide range of applications. In addition to the measurement of vacuum, the differential pressure sensors along with the temperature sensors can be used for the measurement Figure 2 Sensor die containing nine pressure sensor covering a pressure measurement range from 0– 2200 Torr to 0–1 Torr.

Even more, the paper explains more regarding pressure sensors, pressure sensor, and pressure measurement.

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File size: 0.237 MB, number of pages: 8, download server: www.mems-issys.com
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