This paper gives the reader information about measurements, capacitances, and signals. There are many discussion regarding transducer, circuits, and input signals are described in the paper.
In the paper the reader can read explanation like accuracy, current pulse, and signal. These are grabbed from this paper:
Charge-based on-chip measurement technique for the selective extraction of cross-coupling capacitances Alessandro BoglioloDI Loris VendrameST DI – University of Ferrara 44100 Ferrara – Italy firstname.lastname@example.org Abstract Introduction Charge-based capacitive measurements (CBCM)  are gaining importance for on chip interconnect capacitance extraction because of their accuracy and simplicity: the transducer is composed of a nmos and a pmos transistor in a pseudoinverter configuration (Fig. Hence, if signals Vpu, Vpd and Va are repeatedly applied at frequency f, the average measured current is Cx Cx Ag 3.E-14 Vct Ag 60 µ m Coupling C0 2.E-14 2.E-14 30µ m Coupling 1.E-14 5.E-15 0 1 2 3 4 Number of coupling elements (N) Figure 3.
Furthermore, the paper presents info such as coupling capacitances, and frequency.