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Sensors and Actuators, INTEGRATED ELECTRONIC 2 (1982) SENSORS: WORLD 229 – 237 229 INTERFACING ELECTRONICS TO A NON- K D WISE Department of Electrrcal MI48109 (USA) and Computer Engmeerang, Unwerslty of Mrchrgan, Ann Arbor, Abstract This paper considers the rapldlydevelopmg field of mtegrated sensors, in which one or more transducersare homed with custom interface clrcultry on a smgle chip Many of the issues confrontmg continued development m this area are discussed, mcludmg process compatlbdlty and clrcult partltlomng Backed by an mcreasmgly powerful array of sohd-state process technoloses, integrated sensors are expected to be vvldelyapphed to extend microcomputer-based control m a variety of areas Introduction It has been less than twenty-five years smce the first monohthlc sohdstate devices were reahzed using the planar process, but the tremendous progress shown by the emergmg field of mlcroelectromcs ISwell known The functional sophlstlcatlon of monohthlc cn-cults
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