Inside this paper we can get description related to short circuit, circuit, resistivity, sensitivity, pressure range, and temperature. The paper presents explanation such as internal resistance, temperature sensor, measurement, current detection, and current measurement.
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3rd International Conference on Sensing Technology, Nov. 30 – Dec. 3, 2008, Tainan, Taiwan New Type Thin Film Vacuum Sensor Using the Short Circuit Seebeck-Current Detection Type Thermocouple Noriaki Takashima and Mitusteru Kimura Faculty of Engineering, Tohoku Gakuin University, 13-1, Chuo-1,Tagajo, Miyagi, 985-8537, JAPAN firstname.lastname@example.org Abstract We have proposed the thin film vacuum sensor that has a cantilever structure with new temperature difference sensors of the short circuit Seebeck-current detection type thermocouple in order to get higher sensitivity in the higher vacuum range.
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