Thesis About Wireless Micromachined Ceramic Pressure Sensors for High Temperature Environment

There are many explanation like the pressure sensors, ceramic pressure sensors, sensor design, sensor, pressure range, ceramic pressure sensor, circuit, and impedance are presented in the thesis. This thesis contains info like phase, range, frequency, pressure sensor, design, pressure sensor array, and temperature sensor.

Inside the thesis you can get things regarding sensor array, electromechanical model, pressure, single pressure sensor, micromachined pressure sensors, sensitivity, and sensors. The following are selected from this thesis:

In high temperature applications, such as pressure sensing in turbine engines and compressors, high-temperature materials and data retrieval methods are required. The microelectronics packaging infrastructure provides well-developed, high temperature ceramic laminate materials, processing tools, and processing techniques that have the potential for applicability in high temperature sensors. A completely passive wireless telemetry scheme, which relies on a frequency shift output, has been integrated with the sensors, thereby eliminating the need for contacts, active elements, or power supplies to be contained within the sensor.

Giving more content, the thesis presents more such as electromechanical, the discrete circuit, silicon pressure sensors, pressure sensors, system, the pressure sensor, and pressure sensor data.

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File size: 1.668 MB, number of pages: 319, download server: mems.gatech.edu
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